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HPGR-400 & 800 Series ApplicationsFeaturesSpecifications Ultra High Pure Gas Line Semiconductor Hook-Up Line Bulk Gas Line Metal to Metal Diaphragm Seals Leak Tight Integrity Internal Surface EP 10 Ra or 5 Ra micro-inch All Performed in Class 10 Clean Room Available for Semiconductor Applications Maximum Inlet Pressure : 600 psig (41 bar) Outlet Pressure Range : 0-60 psig (0-4 bar), 0-100 psig (0-7 bar), 0-150 psig (0-10 bar), 0-250 psig (1-17 bar) Operating Temperature Range : -15℉ (-26℃) to 176℉ (80℃) DownLoad CatalogPrint